IBM SiView Standard

MM embeds over 400 rich business logic elements to manage objects in wafer, lot, FOUP and equipment, with real-time control and tracking of WIP, product, job and process. It supports 16 operation modes from offline, manual to fully automated, high volume production.

SaR allows users to create workflows to detect business events in existing systems (for example, MM), run business rules and respond to factory resources in real‐time to increase manufacturing usage and efficiency.

APC allows personnel from engineering, science and economics to work on process control models quickly and effectively. It is pre-integrated with MM/DCS, supports Java/BPEL for business logic implementation and can adopt externally developed math models (for example, MATLAB) as a library.

HAS supports clustering of CorbaServer processes (for example, MM servers), automatically detects and recovers process failure and provides the flexibility of extension. Under HAS configuration, application changes for fixes and enhancement can be applied without impacting production activities.

tMSP is a SiView Standard offering for manufacturing tool control application, which controls communications between a piece of equipment and the MES. It runs on an event-driven, service oriented, multithreaded logic engine and uses plug-ins to support business logic, and provides a collection of ready to use modules supporting many common communication protocols.

PDS is a discrete event simulator to predict detailed lot movements, tool utilization and snapshot of work in progress lots in a semiconductor factory. It provides an out-of-box high-speed simulation feature that provides information necessary for decision making in continuous improvement of factory operation such like capacity planning, WIP balancing, throughput increase and lead-time reduction.

RTD is pre-integrated with SiView MES and provides an intelligent decision-making experience in response to ever-changing conditions in the factory. Provided through a browser-based, drag-and-drop rule editor, RTD enables users to create and define business and operation rules with little programming skill.

SPC helps to forecast defect occurrence, improve yield through real-time monitoring on process equipment data trends.

SM provides the build-time specification management functions to create and define operations. Based on SEMATECH CIM Framework, it supports 70+ classes to create and define semiconductor manufacturing scenarios with flexible version control, access control and archive solutions.

XM (FOUP transport) and RXM (Reticle transport), provide an MTSC interface to manage FOUP and reticle transport on the manufacturing floor. They support the SEMI Equipment Communication Standard (SECS), High-Speed SECS Message Service (HSMS), and the Generic Model for Communications and Control of Manufacturing Equipment (GEM).